Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO3 layer transfer

Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator

A high-overtone bulk acoustic resonator (HBAR) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor (Q) and multi-mode resonance spectrum. By analyzing the influences of each layer’s material and structure (thickness) parameters on the effective electromechanical coupling coefficient (Keff), the resonance spectrum characteristics of Keff have been...

Film bulk acoustic-wave resonator based ultraviolet sensor

This letter described ultraviolet UV radiation sensing with ZnO based film bulk acoustic-wave resonator FBAR . The resonant frequency upshifted when there was UV illumination on the FBAR. For 365 nm UV light, the frequency upshift was 9.8 kHz with an intensity of 600 W /cm2, and the detection limit of the sensor was 6.5 nW. The frequency increase in the FBAR UV sensor was proposed to be due to ...

Hydrothermally synthesized PZT film grown in highly concentrated KOH solution with large electromechanical coupling coefficient for resonator

This paper presents a study of lead zirconate titanate (PZT) films hydrothermally grown on a dome-shaped titanium diaphragm. Few articles in the literature address the implementation of hydrothermal PZT films on curved-diaphragm substrates for resonators. In this study, a 50-μm-thick titanium sheet is embossed using balls of designed dimensions to shape a dome-shaped cavity array. Through singl...

High-Overtone Bulk Acoustic Resonator

Bulk Acoustic Wave High Overtone Resonator

the acoustic waves propagation losses in solid solutions of Rare Earth in Ittrium Aluminium Garnets. Matrix were Y^^^AlcO..« found few times lower than that of YAG matrix. The high overtone bulk acoustic wave resonators made of Y-, Lu Alr01o were studies. The Q c .5—X X 2 I £. factor 1.5 2.0*10 at 3.5 4.0 GHz was experimentally found. 1 INTRODUCTION The practical interest to the investigation o...